This paper reports a miniaturized piezoelectric accelerometer suitable for a small haptic\nactuator array. The accelerometer is made with zinc oxide (ZnO) nanowire (NW) grown on a copper\nwafer by a hydrothermal process. The size of the accelerometer is 1.5 Ã?â?? 1.5 mm2, thus fitting\nthe 1.8 Ã?â?? 1.8 mm2 haptic actuator array cell. The detailed fabrication process of the miniaturized\naccelerometer is illustrated. Performance evaluation of the fabricated accelerometer is conducted by\ncomparing it with a commercial piezoelectric accelerometer. The output current of the fabricated\naccelerometer increases linearly with the acceleration. The miniaturized ZnO NW accelerometer is\nfeasible for acceleration measurement of small and lightweight devices.
Loading....